Low-E Coating Machine

NorthGlass horizontal architectural coating machines mainly produce Low-E coated glass, solar-control glass, AR film, etc. by using magnetron sputtering method depositing different kinds of material on the substrate.

Technical Features:
a). The identical 795mm design of vacuum compartments enables users to exchange the location of the pump,gas separation and cathode compartments freely, thus to improve process flexibility.
b). New design of the gas separation device avoids gas drifting between cathode compartments and achieves better gas separation effect.
The extruded aluminum supportingtube makes the magnet andits yoke isolate from the cooling water toavoid the change of the magnetic field due to soaking in the water for a long time.
c). Equipped with 5-9 manifoldauxiliary process gas systems and each could be different as per the process requirement.
d). High precision conveying control can be ensured by servo motors.
e). Reducing the volume of enter and exit chambers to improve efficiency and cut down cost.
f). An integrated cathode lid achieves a perfect combination by putting gas manifold, controllers, connections for power supply and various media in a 鈥渂ox鈥?to make the process configuration more flexible.
g). Every cathode is equipped with an independent control system.
h). The one-piece lid design can makethe mechanical and hydraulic lifting easily, thus to achieve betterautomatic control.

i). By using of advanced maglev turbo-molecular pumps and screw line pumps to prevent pollution from the backflow oil and makes it more reliable and efficient.

Technical Data